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CF-UHV Ultra High Vacuum Components

In the ultra high vacuum range (UHV) with pressures <10-8 mbar cleanliness of the chamber and the flange components is critical. The gas desorption rate is an important factor for achieving UHV conditions. The manufacturing technique, surface treatment and cleaning processes guarantees a low desorption rate. To reach the UHV range as quickly as possible, baking the UHV system at 300 °C with the vacuum pumps running is recommended. At these temperatures elastomer gaskets are suitable for test purposes only. All flange connections are sealed with OFHC copper gaskets (oxygen-free high conductivity copper). CF-flanges are equivalent to Conflat®. The following table shows the various standard dimensions for CH-UHV flanges.

CF-UHV Bolts. CF Viton Seals. CF Copper Seals
CF-UHV Blind Flanges
CF Welding Flanges
CF-UHV Threaded Welding Flanges
CF-UHV Welding Flanges with Pipe Stubs
CF-UHV Reducing Flanges. CF Adapters. CF Stainless Steel Pipe
CF Reducing Adapters. CF Elbows. CF Tees
CF Cross Pieces, 4-Way/ 6-Way. CF Flexible Stainless Steel Tube
CF Reducing Adapters. CF to Swagelock Adapters
CF to CAJON VCR Adapters. CF to CAJON Ultra Torr Adapters

   
Type

A
mm

B
mm

C
mm

D
mm

No of Holes
CF Flange Dimensions
DN 16
34
18.1
4.3
M4
6
DN 40
69.5
38.4
6.6
M6
6
DN 63
113.5
70.4
8.5
M6
8
DN 100
152
104.5
8.5
M6
16
DN 150
202.5
154.5
8.5
M6
20
DN 200
253
206.5
8.5
M8
24
DN 250
306
256.3
8.5
M8
32
           
CF sealing principle
A flat copper gasket fits with a small clearance in the outer recess of the flanges and thus assures centering of the flange connection. The sealing of two opposite flanges is made by the knife edges of the flanges which penetrate the flat copper gasket. The shear action of the outer face of the cutting edge produces a yield pressure on the copper gasket even at high temperatures. Since the stainless steel knife edges penetrate deeply into the soft copper gasket the gasket can only be used once.

For leak testing the grooves machined in a radial direction on the flange surface and extended right up to the gasket are used. The sniffer probe of the leak detector is in direct contact with the gasket.

Components with two or more flanges have at least one rotary flange. On adapter or intermediate parts the rotary flanges allow the mounting of manipulators or current feed throughs etc. in the correct position.

For mounting of sight glasses and current feed-ins to chambers annealed OFHC copper gaskets should be used which are softer and reduce material tensions. Proper assembly is important.
CF Seal Diagram

 

1. Flange bolt
2. CF Flange
3. Copper Sealing Gasket

 

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